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10.01.2010
Fully automatic system for wafers was installed at Helios Germany. The Hennecke Systems Wafer Inspection Module HE-WI-04 measures mono and multi crystalline wafer from 125mm x 125mm up to 210mm x 210mm (rectangular or pseudosquare). The system uses only non-contact measurement methods. The transport is done at a constant speed. This minimizes the stress on the wafer as much as possible.
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